Room temperature vacuum probe stage can provide a room temperature vacuum test environment for electrical parameter testing of semiconductor chips. By connecting different electrical measurement instruments externally, it can complete the parameter testing of integrated circuits, such as voltage, current, resistance, and IV curve, etc. It is used for non-destructive electrical testing of chips, wafers, and devices in a room temperature vacuum environment.
PSV series room-temperature vacuum probe stage is a probe stage specially developed for room-temperature vacuum electrical test environment, capable of repeating non-destructive, standard electrical experiments on 2-inch and 4-inch wafers, and external different test equipment can be used to complete the electrical characteristics of the device, parametric measurements, DC measurements, and RF measurements.
Features:
- The vacuum chamber is capable of reaching an ultimate vacuum of 5E-4 mbar and is evacuated by a vacuum pump connected to a KF25 flange.
- The sample holder can hold 4-inch wafer samples, and the displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing the switching of different devices on the sample for testing without destroying the vacuum. The probe arm can be adjusted in four dimensions within the range of X-Y-Z-R, which can meet all the positions of the 4-inch range of the zigzag test.
- The vacuum chamber is made of aluminium, which can effectively reduce the external electromagnetic interference and improve the accuracy and stability of the test.
- DC probe arm with three coaxial connectors, good leakage performance, the use of 4200 measured leakage current is less than 100fA @ 1V.
- Uniquely designed flexible probe, the probe will be mounted on the copper shrapnel, to avoid excessive force during the zapping process leading to sample or electrode damage.
- Optional microwave probe arm, frequency can reach 110GHz.
