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The HX80N series semi-automatic probe station is a customised comprehensive wafer probe station for sensor wafer testing with excellent test accuracy and can be paired with a customised instrumentation system to complete testing of sensors such as photoelectric sensors, pressure sensors and gas sensors.
The HX80N series semi-automatic probe station is a customised comprehensive wafer probe station for sensor wafer testing with excellent test accuracy and can be paired with a customised instrumentation system to complete testing of sensors such as photoelectric sensors, pressure sensors and gas sensors.
Software function introduction
- Can test discs, test range is optional, support for interlaced sampling and ring test MAP chart can be edited test;
- Support bad point retest;
- With offline punching point, synchronous punching point function;
- With contact buffer function, needle mark stability;
- Running accuracy compensation function, to ensure the stability of the test;
- Test yield, total number, speed display;
- CCD image automatic alignment and positioning;
- The equipment has a certain anti-interference ability, supports high and low temperature testing, stable operation;
- Multi-BIN classification test, test data can be stored, can be exported, compatible with the use of back-channel equipment format, with data statistical analysis function;
- Operators, administrators, system manufacturers rights management functions
Parameters and indicators:
| Performance name | Technical indicators | |
| The diameter of the film can be measured | 6″、12″ | |
| XY worktable | Structure | Linear motor |
| Itinerary | 350mm × 400mm,Resolution:1μm | |
| Spped | >150mm/s | |
| Positioning accuracy | ≤±2μm | |
| Sheet bearing platform | Z-direction travel | 10mm,Resolution:1μm |
| Z-platform accuracy | ≤±1μm | |
| Z-direction resolution | ≤±0.5μm | |
| θ-direction adjustment range | ±25° | |
| θ-direction resolution | 0.006° | |
| Microscope/Video display system | Binocular stereomicroscope/Optional trinocular microscope and CCD real-time video display device | |


