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HX50N series semi-automatic probe table is suitable for 4-inch, 5-inch wafers, including diodes, transistors, MOSFET tubes, vertical structure of the measurement of the chip, especially suitable for warped wafers and high-voltage chip testing, optional multi-needle test function, can be achieved at the same time more than one of the requirements of the measurement, to improve the test capacity of the machine.
HX50N series semi-automatic probe table is suitable for 4-inch, 5-inch wafers, including diodes, transistors, MOSFET tubes, vertical structure of the chip measurement, especially suitable for warped wafers and high-voltage chip testing, optional multi-needle test function, can achieve multiple simultaneous measurement of the requirements of the machine to improve the test capacity.
Software function introduction:
1. Can test the wafer, the test range can be selected, support for interlaced sampling and ring test, MAP map can be edited test;
2. Support bad point retest;
3. With offline punching and synchronous punching functions;
4. With contact buffer function, needle mark stability;
5. Running accuracy compensation function to ensure the stability of the test;
6. Test yield, total number, speed display;
7. CCD image automatic alignment and positioning;
8. The equipment has a certain anti-interference ability, support high and low temperature testing, stable operation;
9. Multi-BIN classification test, test data can be stored, can be exported, compatible with the use of back-channel equipment format, with data statistical analysis function;
10. Operator, administrator, system manufacturer rights management function;
Parameters and indicators:
| Performance name | Technical indicators |
| The wafer size can be tested | 4 inches, 5 inches |
| Workbench stroke | 140mm×150mm |
| Control accuracy | ≤0.001mm |
| Full precision | ≤±0.05mm/140mm |
| Z-direction travel | ≤5mm(adjustable) |
| θ-direction adjustable range | ±15° |
| Support high-voltage testing | ≥2000V |
| Vacuum degree | >-0.08MP |
| Transfer the number of wafers | 25 pieces |
| Power supply | AC220V 50Hz,1KW |


