The main purpose of the room temperature manual probe stage is to provide a test platform for the electrical parameter test of semiconductor chips, external different measuring instruments, with the measuring instruments can be completed with the integrated circuit voltage, current, resistance and capacitance-voltage characteristic curve and other parameters of the test, for the non-destructive testing of chips, wafers and devices at room temperature.
PSM series room temperature manual probe table is a high-quality probe table is able to carry out a large number of non-destructive, standard electrical experiments on 2-inch, 4-inch, 6-inch and 8-inch wafers, and the external connection of different test equipment can complete the measurement of electrical characteristics of the device, parameter measurements, DC measurements. The scientific desktop design is the choice for academic and experimental research.
Features：
- Stable dual displacement adjustment system that adjusts the displacement of the sample holder and probe arm.
- The sample holder can hold up to 8" wafer samples and is fixed by controlled gas adsorption using porous zoning.
- The sliding table under the sample holder can be moved with a travel of ±100mm in the X-Y axis, which makes sample testing and sample changing more convenient. The slide is fixed by magnetic adsorption.
- 6 probe arms can be mounted.
- The probe arms are attached by magnets, which can be moved at will and can be fine-tuned in three dimensions, making it easy to operate and precise in pinning, and the probes of the four probe arms can be pinned to any position of the sample.
- The probe arm adopts tri-coaxial cable and tri-coaxial connector, the leakage current is small, within 100fA.
- The CCD magnification is 180 times and the working distance is 100mm.
