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The PSM-LHe series liquid helium low-temperature probe station can provide a 3K-450K high and low temperature vacuum testing environment for electrical parameter testing of semiconductor chips. By connecting different electrical measuring instruments externally, it can complete the detection of parameters such as voltage, current, resistance, and IV curve of integrated circuits, and is used for non-destructive electrical testing of chips, wafers, and devices in low-temperature vacuum environments.
The liquid helium low-temperature probe station plays a crucial role in scientific research and technological development. It can perform various non-destructive physical and electrical performance tests on samples at low temperatures, helping researchers gain a deeper understanding of the various physical and electrical properties of materials or devices, and providing important data support for the development and application of new materials.
The PSM-LHe series liquid helium low-temperature probe station can provide a 3K-450K high and low temperature vacuum testing environment for electrical parameter testing of semiconductor chips. By connecting different electrical measuring instruments externally, it can complete the detection of parameters such as voltage, current, resistance, and IV curve of integrated circuits, and is used for non-destructive electrical testing of chips, wafers, and devices in low-temperature vacuum environments.
Feature:
• Liquid helium low-temperature vacuum probe station, with a chamber vacuum degree of up to 10E-4 torr.
• The displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing for switching between different devices on the sample for testing without damaging the vacuum.
• Unique probe arm X-Y-Z-R four-dimensional adjustment, capable of testing up to 4-inch samples. Up to 6 probe arms can be installed simultaneously, and probe arms can be selected from DC arm, fiber arm, microwave arm, etc.
• The material of the vacuum chamber is aluminum, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of testing.
• The probe arm adopts a three coaxial connector with good leakage performance, and the measured leakage current is less than 30fA@1V @3K--450K。
• Wide temperature range for testing, supporting up to 3K-450K continuous temperature variation.
Parameters and indicators:
| Probe station host classification | ||
| model | PSM-LHe-2 | PSM-LHe-4 |
| temperature range | 3K--450K | 3K--450K |
| Temperature control stability | +/-50mK | |
| Sample holder | ||
| Type and Material | Oxygen free copper grounding gold-plated sample holder | |
| size | 2 inches | 4 inches |
| Optional specifications | Insulation sample holder (temperature can only reach 400K) Coaxial sample holder (temperature can only reach 400K) Triple coaxial sample holder (temperature can only reach 400K) | |
| Probe arm | ||
| type | DC probe arm (standard) | |
| Customizable specifications | Microwave probe arm, fiber optic probe arm, thermocouple probe arm | |
| quantity | 4 | |
| Connectors and cables | Triple coaxial connector+ultra-thin coaxial low-temperature cable | |
| leakage current | 30fA@1V in a vacuum environment | |
| signal frequency | DC-50MHz | |
| match impedance | 50Ω | |
| displacement range | X+/- 12.5mm,Y+/- 50mm Z +/-7.5mm, R+/-10° | X+/- 12.5mm,Y+/- 50mm Z +/-7.5mm, R+/-10° |
| Optical system | ||
| Microscope magnification | 500times | |
| resolution | less than 2 microns | |
| field of view | up to 22mm | |
| working distance | 90-100mm | |
| vacuum chamber | ||
| material | aluminum alloy | |
| vacuum chamber size | 8-inch | |
| Window size | 2 inches | 4 inches |
| Vacuum chamber window | Infrared absorption window | |
| inner layer | Standard quartz window | |
| degree of vacuum | 5E-4 torr | |
| reserved interface | 2 probe arm interfaces&2 electrical interfaces | |
| Radiation shielding material | stainless steel | |
| Specialized vibration isolation table | ||
| size | 800*800*800 | 900*900*800 |
| Table push | Fixed feet&rollers | |
| vibration damping | Gravity damping&air floating damping pad | |


