The Room Temperature Electromagnet Probe Stage not only performs the tests that can be done with a permanent magnet probe stage, but also provides a variable magnetic field for sample testing with a stronger magnetic field and a larger uniform magnetic field zone. This Probe Stage is designed for experiments that require continuous magnetic field variation during the measurement process and non-destructive testing of chips, wafers and devices at room temperature.
PSEM Series Room Temperature Electromagnet Probe Stage is a probe stage specially developed for room temperature variable magnetic field electrical measurement environment, providing ±0.6T vertical magnetic field or ±0.3T horizontal magnetic field, capable of 2 inch, 4 inch wafer repeatability, standard electrical experiments, external different test equipment can be completed on the device's electrical characteristics, parametric measurements, DC measurements, RF measurements, and Hall measurements.
Features：
- The sample holder can hold 4-inch wafer samples. By moving the slide under the sample holder, it can achieve ±50mm travel in X-Y axis, and the sample holder itself can be finely adjusted in three dimensions, which makes the sample testing and sample changing more convenient.
- The base of the probe arm is fixed with a magnet, allowing the probe to be adjusted in three dimensions, X-Y-Z, and with the sample holder's shift adjustment, the probe can be quickly inserted into any position of the 4-inch sample (6 probe arms can be mounted, and 4 horizontal magnetic field electromagnets can be mounted in the probe table).
- Probe arm with triaxial cable and triaxial connector, small leakage, leakage current within 100fA, probe arm built-in cable to avoid messy wiring.
- The probe is fixed with needle sleeve, only the tip of the needle is exposed, reducing the leakage of electricity.
- Electromagnet bracket and probe stage adopt separate isolation bracket to avoid vibration transmission to the sample when the magnet is moving.
- Sample fixing method adopts porous partition adsorption, there are three individually controlled gas adsorption channels in the outer ring, inner ring and the middle, which can adsorb and fix 1mm*1mm samples.
- CCD magnification of 180 times, working distance of 100mm.
