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PSM-65K Low Temperature Probe Stage, using a small low vibration closed-cycle refrigeration, without the need to consume liquid helium, the temperature of 65K, vibration is less than 1 μm, a wide range of test temperatures to support the 65K-350K continuous temperature change, low power consumption, input power of 320W.
Cryogenic Probe Stations play a vital role in scientific research and technology development. It is capable of performing various non-destructive physical and electrical property tests on samples in a low-temperature environment, which helps researchers gain an in-depth understanding of the various physical and electrical properties of materials or devices, thus providing important data support for the development and application of new materials.
PSM-65K Cryogenic Probe Station is an economical and compact closed-cycle cryogenic probe station with compact and low vibration design, which can provide a <65K-350K high and low-temperature vacuum test environment for electrical parameter testing of semiconductor chips, and by connecting with different electrical measurement instruments, it can complete the testing of materials/devices with parameters such as IV, CV, optics, and microwave, etc., and realise non-destructive electrical testing of chips, wafers and devices in a low-temperature vacuum environment. Non-destructive electrical testing of chips, wafers and devices under low-temperature vacuum environment.
Features:
- Uses small, low-vibration closed-cycle refrigeration without liquid helium consumption at 65K.
- Vibration is less than 1μm.
- Wide test temperature range, support 65K-350K continuous temperature change.
- Low power consumption, input power 320W.
- Probe arm displacement adjustment is operated outside the vacuum chamber, allowing different devices on the sample to be switched for testing without destroying the vacuum.
- The unique four-dimensional X-Y-Z-R adjustment of the probe arm allows for testing of up to 4-inch samples.
- The probe arm adopts tri-coaxial connector with good leakage performance, measured leakage current is less than 100fA @1V@65K-350K.
- The vacuum cavity is made of aluminium, which can effectively reduce the external electromagnetic interference and improve the accuracy and stability of the test.
Parameters and indicators:
| Classification of probe station mainframes | ||
| model | PSM-65K-2 | PSM-65K-4 |
| temperature range | 65K-350K | |
| temperature control stability | +/-50mK | |
| vibration | <1μm | |
| sample holder | ||
| Type and Material | Oxygen-free copper grounding gold-plated sample holder | |
| size | 2 inches | 4 inches |
| Optional configuration | Insulating sample holder (temperature can only reach 400K) | |
| probe arm | ||
| type | DC probe arm | |
| quantity | 4 | |
| connector and cable | Three coaxial connectors + ultra-thin coaxial low-temperature cable | |
| leakage current | 100fA@1V in a vacuum environment | |
| signal frequency | DC-50MHz | |
| matching impedance | 50Ω | |
| displacement range | X+/- 35mm,Y+/- 12.5mm,Z +/-6.5mm R+/-10° | X+/- 50mm,Y+/- 12.5mm,Z +/-6.5mm R+/-10° |
| optical system | ||
| Microscope magnification | 10-180times | |
| resolution | 3μm | |
| field of view | 22mm | |
| working distance | 90-100mm | |
| vacuum chamber | ||
| material | aluminum alloy | |
| chamber volume | 4L | 5.5L |
| Overall dimensions | 800*800*600 | 900*900*600 |
| cavity inner diameter | 124mm | 155mm |
| window size | 50mm | 100mm |
| Vacuum chamber window | Standard quartz window | |
| Radiation-proof screen window | Infrared absorption window | |
| degree of vacuum | 5E-4 torr | |
| reserved interface | 2 probe arm interfaces & 2 electrical interfaces | |
| Radiation-proof screen material | stainless steel | |
| Radiation-proof screen material | 60 minutes to 77K | 100 minutes to 77K |
| cold source | Stirling cryocooler | |
| Dedicated vibration isolation table | ||
| size | 800*800*800 | 900*900*800 |
| table push | Fixed foot & roller | |


